ELEC 5707 [0.5 credit] (ELG 6377)
Microsensors and MEMS
Physical design of microelectromechanical systems (MEMS) and microfabricated sensors and actuators. An overview of thin and thick film processes and micromachining techniques will provide fabrication background. Device design including piezoresistive, piezoelectric, electromagnetic, thermal, optical, and chemical sensors and actuators.Summer session: some of the courses listed in this Calendar are offered during the summer. Hours and scheduling for summer session courses will differ significantly from those reported in the fall/winter Calendar. To determine the scheduling and hours for summer session classes, consult the class schedule at central.carleton.ca
Not all courses listed are offered in a given year. For an up-to-date statement of course offerings for the current session and to determine the term of offering, consult the class schedule at central.carleton.ca
